Electron Guns / Power Supplies:
PRODUCT GUIDE
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Model EMG-4212,
30keV
Electron Gun
with adjustable feedthrough, focus and deflection, mounted
on a 41/2CF
flange |
Kimball Physics Electron Guns are designed
for use in
a wide variety of ultra high vacuum (UHV) surface physics, space physics,
and processing applications. The
electron guns with their matching power supplies are
complete subsystems ready to attach to a user-supplied vacuum system. A wide
variety of models are available, from low-energy systems (5 eV-1000 eV) to
high-energy systems (1 keV-100 keV). Beams produced
range from flood beams to focusable, small spots. Beam
currents range from nanoamperes to tens of milliamperes. Miniature
sizes are available.
Applications include:
Surface physics (RHEED, ESD, IPES, LEED), Space
physics, Vacuum science, Accelerators /
Free electron lasers, Electron lithography, X-ray generation, Charge
neutralization, Semiconductor manufacturing equipment, Gas excitation,
and Medical research.
Electron gun and power
supply prices vary with the system configuration and options; please call
or email Kimball Physics for a quotation.
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FEATURES
and OPTIONS on Various Electron Gun Systems |
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Independently adjustable beam energy, beam
current. Spot size and deflection angle are also
independently adjustable on focusable guns.
- Excellent beam stability:
Feedback-stabilized emission current control
over several orders of magnitude , ±
0.1% per hour
Energy Stability:
±
0.01% per hour, ±
0.02% per 8 hours at full output.
Tracking:
All operating parameters can be set to be proportional to other
parameters, for example, Focus can be set to vary with Energy
to maintain spot size.
Storable control
settings: Retrievable
with a single Resume button.
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- Computer remote control / metering:
LabViewTM,
RS-232, or analog programming at ground potential.
- Energy sweeping:
Constant beam current can be maintained over a wide range of
energy.
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Mechanical alignment during full operation
with beam and high voltage on
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Fast
pulsing / Beam blanking
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Deflection / Rastering
- Gun-mounted Faraday cups
- Customer-replaceable firing units
All options are not
available on all gun systems. See the
Technical Notes for more information on these features and options.
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NOTE:
It is not necessarily possible to achieve all maximum specifications
simultaneously. For example, maximum beam current is typically not
available at minimum energy; minimum spot size is typically not
available at longer working distances.
Specifications are subject to change without notice. |
A typical Kimball Physics power supply with FlexPanel
controller |
Gun models in table are
grouped in order of the energy (eV) produced.
Links to table below:
Lower Energy Electron
Guns up to 5keV
Mid Energy Electron Guns
10keV to 30keV
Higher Energy Electron
Guns 50keV to 100keV
Power Supplies
Click on a photo for a larger view.
Click on an underlined gun model for its PDF specification pages. |
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New higher energy
5eV to 2000eV
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 10µA
Constant current and approx. constant spot size over wide range in energy.
Spot size: 0.5 to 5mm
Deflection, Pulsing, Rastering
23/4CF Mounted,
Demountable option |
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5eV to 1000eV
Flood beam
Beam: 1nA to 400µA
100µA at 50eV
Spot size: 2mm at 50mm WD
Unmounted or CF Mounted
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100eV to 2000eV
Flood beam, High current
Beam: 1nA to 2mA
Spot: 2 mm at 50mm WD
11/3CF
or
23/4CF Mounted or Unmounted
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50eV to 1500eV
Flood and Focusable
Beam current/ Spot sizes:
1nA to 100µA / 1 to 100mm
1nA to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF
Mounted,
Demountable option
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CUSTOM ELECTRON GUN and POWER SUPPLY DESIGNS
Kimball Physics designs completely new gun systems
and also modifies
existing designs to meet a wide variety of research and industry needs.
Consult the Kimball Physics Engineering Dept by
phone or e-mail.
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50eV to 1500eV
Flood beam
Beam: 1nA to 100µA
Option: 10nA to 400µA
Spot size: 10 to 50mm
Unmounted or
Various CF mounted styles
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50eV to 1000eV
Focusable
Beam: 1nA to 100µA
Spot size: 1 to 25mm
Deflection, Pulsing, Rastering
23/4CF Mounted,
Demountable option
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25eV to 1000eV
Focusable, Zoom lens for energy sweeping
Beam: 5nA to 10µA
Spot size: 0.5 to 5mm
Miniature gun: 30mm length
Minimum profile geometry
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10eV to 1500eV
Sheet beam
Beam: 10µA to 1mA
Spot size 1 x 5mm at exit
23/4CF Mounted
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10eV to 3000eV
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 10µA
Constant current and approx. constant spot size over wide range in energy.
Spot size 0.5 to 5mm
Deflection, Pulsing, Rastering
Unmounted or
23/4CF Mounted
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100eV to 5000eV
Flood and Focusable
Beam current/ Spot sizes:
10nA to 100µA / 1 to 100mm
1 µA
to 1mA / 3 to 100mm
Deflection, Pulsing, Rastering
23/4CF
Mounted
Demountable option
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NEW
50eV to 5000eV
Focusable, Zoom lens for energy sweeping
Beam: 1nA to 100µA
Spot sizes: 1 to 10mm
Deflection, Pulsing, Rastering
23/4CF
Mounted
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1 to 5 keV Power Supply with new
FlexPanel Controller (front view) |
(back view, with standard connectors) |
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POWER SUPPLIES with NEW
MODULAR DIGITAL ELECTRONICS
Power Supplies included with Electron Gun Systems
supply all voltages to drive a given electron gun: High voltage, Source,
Grid, Focus, etc.
A new generation of compact power supplies, is being developed for all standard units.
All features of larger units (listed below) are available. |
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Mid-Energy Electron Gun Systems
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100eV to 10keV
New modular design,
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 60µm to 10mm,
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable
Deflection, Pulsing, Rastering, Blanking
23/4CF
Mounted
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NEW
100eV to 10keV
Focusable
Beam Current/ Spot size:
0.2 to 10mA / 1.5 to 20mm
5 to 50mA / 5 to 25mm
Deflection, Rastering
23/4CF Mounted
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500eV to 20keV
Apertured beam
Beam: 1nA to 20µA
Spot size: 2 to 10mm
Beam uniformity: ± 5%
Electromagnetic alignment
23/4CF Mounted |
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200eV to 20keV
Flood beam
Beam: 1nA to 200µA
Spot size: 30 to 300mm
Pulsing, Magnetic beam rocking
23/4CF Mounted |
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1keV to 20keV
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 100µm to 10mm
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable feedthrough,
Pulsing,
Deflection, Rastering
41/2CF
Mounted |
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NEW
1keV to 30keV
Focusable small spot column
Beam: 10nA to 1µA
Spot: 15 to 500µm
Alignment, Deflection Stigmatior,
Octopole rastering,
Blanking,
Inline Faraday cup, Differential pumping, Magnetic shielding
41/2CF or 6CF Mounted
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NEW
1keV to 30keV
New modular design,
Beam current/ Spot sizes:
10nA to 100µA / 0.5 to 25mm,
1nA to 10µA / 100µm to 10mm
1µA to 1mA / 1.5 to 25mm
Various cathode types
Beam align adjustable feedthrough,
Pulsing,
Deflection, Rastering
41/2CF
Mounted
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30 keV Electron Gun system with Power Supplies and
National Instruments LabVIEWTM computer control. |
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1keV to 50keV
Focusable, Magnetic lens
Beam: 10nA to 100µA
Spot size: 0.5 to 100mm
Pulsing, Magnetic deflection
41/2CF or
6CF Mounted |
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1keV to 50keV
Focusable flood beam
Beam: 1nA to 5mA
Spot size:10 to 500mm
6CF Mounted |
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10keV to 100keV
Flood beam
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 3 to 100mm
23/4CF, 41/2CF, or 6CF Mounted |
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NEW 10keV to 100keV
Focusable, Magnetic lens
Beam current/ Spot sizes:
10nA to 1mA / 500µm to 10mm
10nA to 100µA / 60µm to 10mm
Pulsing,
Magnetic deflection
6CF Mounted |
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1keV to 100keV
Focusable flood beam
Beam: 50nA to 100µA
Spot size: 10 to 500mm
Rastering for uniform beam,
Pulsing
6CF Mounted |
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NEW
10keV to 100keV
Focusable, Magnetic lens
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1 to 100mm
Magnetic deflection,
Differential pumping,
6CF Mounted |
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NEW
10keV to 100keV
Focusable 2 lens system
Beam: 10nA to 1mA
Pulsed beam up to 20mA
Spot size: 1mm to 15mm
Magnetic deflection,
Differential pumping, gate valve,
6CF Mounted |
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High Energy Electron Gun system with Power Supplies and
National Instruments LabVIEWTM computer control. |
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POWER SUPPLIES with
NEW
MODULAR DIGITAL ELECTRONICS
Power Supplies
included with Electron Gun Systems
supply all voltages to drive a given electron gun: High voltage, Source,
Grid, Focus, etc.
See electron gun for power supply specifications. A new generation
of power supplies is being developed for all standard units.
Features include:
FlexPanel controller
Digital fluorescent panel display with keypad
Miniaturized floating power supply clusters
Optical isolated control
EMI resistant
Independently adjustable beam energy, beam current, spot size and deflection
angle
Feedback stabilized emission current control over several orders of magnitude,
±
0.1% per hour
Storable parameter settings, retrievable with single button
Computer remote control and metering, with rear panel connectors: analog inputs/outputs at ground potential
and RS-232 serial interface (RS-422/RS-485 available)
LabVIEWTM computer programs available
Deflection, electrostatic or magnetic
Beam pulsing or blanking
Raster generation
CE compliant and SEMI S2&S8 designs available
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10 keV Power Supply with new FlexPanel Controller
(front view) |
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(back view , with standard computer/remote control
connectors) |
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Underlined gun models link to PDF
specification pages.
If you need a PDF reader, click the Adobe logo to download it
now.
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