Ion Guns (Ion Sources) / Power Supplies: PRODUCT GUIDE
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Model IGL-2101, 1
keV
Ion Gun with
electron-impact gas ionization, differential pumping, adjustable feedthrough, focus and deflection, mounted
on a
23/4CF
flange |
Kimball Physics ion guns (ion sources) with their
matching power supplies are complete subsystems ready to attach to
a user-supplied vacuum chamber. Ion gun models range from low energy systems to higher energy systems.
Beam currents range from nanoamperes to microamperes,
and spot sizes from millimeters up to a few centimeters. Two types
of ion sources are available with standard ion guns: 1) electron impact ionization
sources of inert gases
(such as He or Ne) and active gasses (such as N2 or O2)
or 2) alkali metal ion sources producing positive ions by surface ionization
of a solid alkali metal compound (Cs+, Li+, Na+, K+ or Rb+ ions).
Special ion / proton sources are also available; please contact
engineering.
Applications include: Surface physics, vacuum physics,
space
physics, charge neutralization, low energy sputtering, detector
calibration, secondary ion mass spectrometry, ion injection for MBE.
Ion gun and power supply prices vary with the system
configuration and options; call or e-mail Kimball Physics for a
quotation.
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FEATURES
and OPTIONS on Various Ion Gun Systems |
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Independently adjustable beam energy and beam
current. Spot size and deflection angle are also
independently adjustable on focusable guns.
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Excellent beam stability:
Feedback-stabilized
electron current control
for stable gas ionization, feedback-stabilized emission control
for alkali metal ions.
Energy Stability:
±
0.01% per hour, ±
0.02% per 8 hours at full output.
Tracking:
All operating parameters can be set to be proportional to other
parameters, for example, Focus can be set to vary with Energy
to maintain spot size.
Storable control
settings: Retrievable
with a single Resume button.
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Computer remote control / metering:
LabViewTM,
RS-232, or analog programming at ground potential.
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Differential pumping
on gas input systems
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Energy sweeping:
Constant beam current can be maintained over a wide range of
energy.
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Deflection / Rastering
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Fast
pulsing with
alkali
metal ion guns only
- Gun-mounted Faraday cups
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Customer-replaceable firing units
All options are
not available on all gun systems.
See the
Technical Notes for more information on these features and options. |
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NOTE: It is not necessarily possible to achieve all maximum
specifications simultaneously. For example, maximum beam current is
typically not available at minimum energy; minimum spot size is
typically not available at longer working distances.
Specifications are subject to change without notice. |
A typical Kimball Physics power supply with FlexPanel
controller |
Click on a photo for a larger view.
Click on an underlined gun model for its PDF specification pages. |
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NEW Ions from inert/active gases
10eV to 1keV
Option: 10eV to 5keV
Focusable, Zoom lens
Constant spot over energy range
Beam: 1nA to 100nA
Beam (5keV opt.): 1nA to 100nA
Spot size: 1mm to 20mm
Differential pumping, Deflection, Rastering
23/4CF Mounted |
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Electrons and Ions from gases
10eV to 3keV
Focusable, Zoom lens
Electron beam: 1nA to 10µA
Ion beam: 1nA to 100nA
Spot size: 1mm to 10mm
Work dist: 5mm to 100mm
Differential pumping, Deflection, Raster
23/4CF Mounted |
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Cs+, Li+, Na+, K+, or Rb+ ions
10eV to 1keV
Focusable, Zoom lens
Constant spot over energy range
Beam: 1nA to 100nA
Spot size: 1mm to 5mm
Work dist: 10mm to 200mm
Deflection, Rastering Pulsing,
23/4CF Mounted or Demountable |
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Cs+, Li+, Na+, K+, or Rb+ ions
50eV to 5keV
Flood beam
Beam: 1nA to 2µA
Spot size: 1mm to 20mm
Work dist: 10mm to 200mm
23/4CF
Mounted |
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Microwave ion source
50eV to 5keV
Energy option: 1keV to 20keV
Focusable, E X B filter,
Beam: 1nA to 15µA
Spot size: 0.5mm to 20mm
Work dist: 20mm to 300mm
41/2CF, 6CF or 8CF Mounted |
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Alkali Metal Ion Gun Power Supply |
Gas Ion Gun Power Supply |
POWER SUPPLIES
NEW MODULAR DIGITAL ELECTRONICS
Power
Supplies included with Ion Gun Systems
supply all voltages to drive a
given ion gun: High voltage, Source, Grid, Focus, etc. See ion
gun for power supply specifications. A new generation of power
supplies is being developed for all standard units.
FlexPanel controller
Digital fluorescent panel display with keypad
Miniaturized floating power supply clusters
Optical isolated control
EMI
resistant
Feedback stabilized emission
Computer remote control and metering, with rear panel
connectors: analog inputs/outputs at ground
potential and
RS-232 serial interface (RS-422/RS-485 available)
LabVIEWTM computer programs available
Deflection and
Raster generation
CE
compliant and SEMI S2&S8 designs available |
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CUSTOM
ION GUN and POWER SUPPLY DESIGNS
Kimball Physics designs completely new gun systems
and also modifies
existing designs to meet a wide variety of research and industry needs.
Consult the Kimball Physics Engineering Dept by
phone or e-mail.
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See also
Vacuum components,
including ion pump:
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Kernco MODION
ION PUMP / GAUGE
NEW
Power supply module
Pumping speed: 0.5l/sec
Operating range: 10-4 to 10-8 torr
Titanium cathode
Visual monitoring LED bar
Switchable wall adaptor and battery back-up
Remote monitoring and control |
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Underlined gun models link to PDF
specification pages.
If you need a PDF reader, click the Adobe logo to download it
now.
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