Kimball Physics Ion Guns Specifications Table

Ion Gun System (Ion Source) ILG-2C & IGPS-2101

Click on an underlined gun model for its PDF specification pages.

Kimball Physics ion guns (ion sources) with their matching power supplies are complete subsystems ready to attach to vacuum chambers. Ion gun models range from low-energy systems to higher-energy systems, with beam currents in the nanoampere to microampere range, and spot sizes up to a few centimeters. Standard sources include electron impact ionization sources of inert gases (such as He or Ne) or active gasses (such as N₂ or O₂), and alkali metal ion sources producing positive ions by surface ionization of a solid alkali metal compound (Cs+, Li+, Na+, K+ or Rb+ ions). Special ion / proton sources are available; please contact engineering.

NOTE: It is not necessarily possible to achieve all maximum specifications simultaneously. For example, maximum beam current is typically not available at minimum energy; minimum spot size is typically not available at longer working distances.
Specifications are subject to change without notice.

MODEL	TYPICAL APPLICATION	ENERGY	CURRENT	ION SPECIES	SPOT SIZE	WORKING DISTANCE	MOUNTING	FEATURES/ OPTIONS
ILG-2101	Low Rate Sputtering Charge Neutralization Detector Calibration	10eV–1keV Energy Option: 10eV–5keV	1nA–1µA 1nA–5µA	Inert gasses or Oxygen	1mm–20mm	5mm–100mm	2³/4 CFF	Differential Pumping Rastering Gas Flow & Emission Current Stabilization
E/IMG-16	Electron Source & Ion Source Combined	10eV–3keV	For electrons: 1nA–15µA For Ions: 1nA–1µA	Inert gasses or Oxygen	1mm–10mm	5mm–100mm	2³/4 CFF	Differential Pumping Rastering Gas Flow & Emission Current Stabilization
ILG-6	Surface Physics, Ion Scattering	10eV-1keV	1nA-100nA	Cs⁺, Li⁺, Na⁺, K⁺, Rb⁺	1mm-5mm	10mm-200mm	2³/4 CFF	Pulsing / Rastering Faraday Cup Demountable Gun
IGS-4	Alkali Metal SIMS	50eV–5keV	1nA–2µA	Cs⁺, Li⁺, Na⁺, K⁺, Rb⁺	1mm–10mm	10mm–200mm	2³/4 CFF
IMG-31	ECR Microwave MBE / UHV	50eV–5keV Energy Option: 1keV–20keV	1nA–15µA	Positive Ions from Gaseous Atoms/Molecules	0.5mm–20mm	20mm-300mm	4¹/2 CFF	E X B Filter Differential Pumping Isolation Valve Faraday Cup Deceleration Lens

Underlined gun models link to PDF specification pages.
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Ion Guns / Power Supplies: SPECIFICATIONS TABLE

MODEL

TYPICAL APPLICATION

ENERGY

CURRENT

ION SPECIES

SPOT SIZE

WORKING DISTANCE

MOUNTING

FEATURES/ OPTIONS

ILG-2101

E/IMG-16

ILG-6

IGS-4

IMG-31

WORKING
DISTANCE

FEATURES/
OPTIONS